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MEMS valves

The need for small valves in many products is increasing and customers are seeking benefits such as decreased dead volume, small size, low cost, increased functionality, and normally closed valves. State-of-art solenoid valves are, unfortunately too large and expensive to use in many cases. They can’t be miniaturized without a drop in performance. We believe MEMS is the only solution. However, there are not many commercial MEMS valves available to choose from.

We utilize our miniature multi-stable actuator, and its large mechanical work, to design normally opened (NO) or closed (NC) valves that are small, can withstand high pressures, and can be battery driven. We have shown its function with proof-of-concepts and demos. We help you finding the right solution to your need.

Please contact us and let us know what you need and how we can help you.


Valve chip with four integrated micro valves.
Demo valve*
Component
Type
Fluid
Orifice
Drive
Size
Material
Working temperature
Valve
NO and/or NC
Water
0.5 mm in diameter
3-5 V DC, no power when open or closed
10x10x1.5 mm³
PEEK, 3 layers
< 60°C
*Conceptual demonstration only. We customize the valve to meet your specifications and specific needs.
 
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